Piezo MEMS
- Excellent PZT film properties
- Uniformity within wafer ~0.5%
- Breakdown voltage >150V/μm
- Piezo Electric Effect (e31=15)
- Integration of PZT in MEMS process flows
- Fully equipped production line with RTA, XRD, aixacct 4 point bender
- Integration of PZT and Sil-Via ® TSV
